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发表于2024-11-08
Fundamental Electron Interactions with Plasma Processing Gases pdf epub mobi txt 电子书 下载 2024
This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.
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Fundamental Electron Interactions with Plasma Processing Gases pdf epub mobi txt 电子书 下载 2024