MEMS Vibratory Gyroscopes pdf epub mobi txt 电子书下载 2024

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Acar, Cenk/ Shkel, Andrei M.

2008-10

272

$ 202.27

9780387095356

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发表于2024-12-01

MEMS Vibratory Gyroscopes epub 下载 mobi 下载 pdf 下载 txt 电子书下载 2024

MEMS Vibratory Gyroscopes pdf epub mobi txt 电子书下载 2024

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

MEMS Vibratory Gyroscopes 下载 mobi epub pdf txt 电子书