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RF Power for Industrial Applications pdf epub mobi txt 电子书下载 2024

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Louis E. Frenzel

Prentice Hall

2003-05-31

288

USD 120.40

Hardcover

9780130965776

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发表于2024-11-28

RF Power for Industrial Applications epub 下载 mobi 下载 pdf 下载 txt 电子书下载 2024

RF Power for Industrial Applications pdf epub mobi txt 电子书下载 2024

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For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power. This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.

RF Power for Industrial Applications 下载 mobi epub pdf txt 电子书