This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors--an outstanding group of researchers--discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science. Klaus Wetzig studied physics at the University of Technology in Dresden, receiving his licence in 1963, his doctorate in 1967 and his habilitation in 1973. In 1975 he moved to the Academy of Sciences, and since 1992 he is Professor of Materials Analysis at the University of Technology in Dresden and Director at the Leibniz Institute for Solid State and Materials Research Dresden. His research interests include materials analysis and microstroctures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general. Claus Michael Schneider studied physics at the Institute of Technology Aachen receiving his diploma in 1985. He obtained his phD in 1990 at the Free University of Berlin and his habilitation in 1996 at Martin-Luther-University Halle. In 1998 he moved to the Leibniz-Institute of Solid State and Materials Research Dresden, heading the department of thin film systems andnanostructures. His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.