Soft X-Rays and Extreme Ultraviolet Radiation pdf epub mobi txt 电子书下载 2024

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David Attwood

Cambridge University Press

1999-08-28

486

USD 85.00

Hardcover

9780521652148

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发表于2024-07-01

Soft X-Rays and Extreme Ultraviolet Radiation epub 下载 mobi 下载 pdf 下载 txt 电子书下载 2024

Soft X-Rays and Extreme Ultraviolet Radiation pdf epub mobi txt 电子书下载 2024

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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

Soft X-Rays and Extreme Ultraviolet Radiation 下载 mobi epub pdf txt 电子书